产品详情
薄膜应力 Film Stress and Wafer Bow
薄膜应力 Film Stress and Wafer Bow
Brand: FSM
Model: 413
产品详情

应用领域: IC fab, wafer manufacturing, LED, MEMS, photonics.
设备特性:Laser scanning technique, fast, accurate, non-invasive.
·Advanced stress measurement system using optilever laser scanning.
·Mapping whole wafer, 3D and 2D display.
·Measures film stress and wafer bow.
·Over 400 systems installed in IC fabs and R&D labs worldwide.

美国:+1 (408) 420-3561    |   北京:+86 (010) 62561331    |   上海:+86 (021) 61363596


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