产品详情
Thermco 5000/8000 Furnace Systems
Thermco 5000/8000 Furnace Systems
Brand: Thermco
Model: 5000/8000
产品详情


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General Description

§ The Loadstation
§ The Furnace
§ PC-MUX Controller
§ Gas Source Cabinet
§ Scavenger
§ Robotics/Automation


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Thermco5000 Series
5000series was developed for 150mm wafer processing
Up to1016 mm flat zone (5200 model)
Typically4 tubes per stack
Normallyconfigured for semi-automatic loading

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Thermco8000 Series
8000Series is Thermco’s largest furnace system
Developedfor 200mm wafers
Usedin PV production for 156x156mm cells
Up to5 tubes in one stack
Canbe configured for full automation
Up to1100 mm flat zone (8200 model)

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