Pitch Changing Back-to Back

Features & Benefits

• Transfers 24 to 26 wafers between one standard pitch plastic cassette and one custom process boat in a contact back-to-back configuration.

• As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.

• Machine interface is a 12 key pad with a 4 line LCD Display.

• Designed to limit particle contamination by using lead screw drive and stepper motor, “clean room grade” rails and bearings and electric boat sensors.

• All aluminum parts are hard black anodized for corrosion resistance.

• Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.

• Lift system uses ramped speed controls for gentle pick-up and landing.

• Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.

• Machine will not drop wafers in the event of a power failure and will prompt the operator through the “Recovery Mode” after power has been restored.

• A “Technician Mode” is provided to facilitate preventative maintenance.

• Uptime will exceed 99.25%.

  • MTBF (mean time between failure): 100,000 wafers

  • MTBA (mean time between assist): 25,000 wafers

  • MTTR (mean time to repair): less than 1 hour