产品详情
Pitch Changing Back-to Back
Pitch Changing Back-to Back
Brand: Mactronix
Model: PCB-x00
产品详情

Specifications

  • Power:

  • 220/110VAC    50/60Hz    Single Phase

  • 3 Amp @ 110VAC

  • CDA/N2 :

  • 80 to 90 psi

  • Gronding

  • Single Point Low Impedance VAC (provided)

  • Exhaust:

  • 1.25″ Diameter port; 5 CFM max (non-process)

  • Wafer Size:


  • 4″ (100mm)  thru  6″ (150mm)

  • Weight:

  • ≈ 125 Lbs.

  • Dimensions (W x D x H):

  • 13″ x 21″ x 60″

  • NOTE: Optional Extended Platform will add ≈ 10″ to the overall width.

Options

  • Extended Platform

  • RS232 communications port

  • Recessed mounting

  • Vespel package for high temperature applications

  • Stainless steel covers

  • Hot boat sensor


Features & Benefits

  • Transfers 24 to 26 wafers between one standard pitch plastic cassette and one custom process boat in a contact back-to-back configuration.

  • As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.

  • Machine interface is a 12 key pad with a 4 line LCD Display.

  • Designed to limit particle contamination by using lead screw drive and stepper motor, “clean room grade” rails and bearings and electric boat sensors.

  • All aluminum parts are hard black anodized for corrosion resistance.

  • Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.

  • Lift system uses ramped speed controls for gentle pick-up and landing.

  • Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.

  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the “Recovery Mode” after power has been restored.

  • A “Technician Mode” is provided to facilitate preventative maintenance.

  • Uptime will exceed 99.25%.

    • MTBF (mean time between failure): 100,000 wafers

    • MTBA (mean time between assist): 25,000 wafers

    • MTTR (mean time to repair): less than 1 hour



美国:+1 (408) 420-3561    |   北京:+86 (010) 62561331    |   上海:+86 (021) 61363596


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