产品详情
Eureka Transfer Machine
Eureka Transfer Machine
Brand: Mactronix
Model: UKA-x25 A3
产品详情
Specifications


  • CDA/N2:

  • 70 to 90 psi

  • Exhaust:

  • 1.25″ Diameter port; 5 CFM max (non-process)

  • Wafer Size:

  • 3″ (75mm)  thru  8″ (200mm)

  • Weight:

  • ≈ 35 – 50 Lbs.

  • Dimensions (W x D x H):

  • 75mm thru 150mm (3″ thru 6″): 8.2″ x 12.2″ x 26.3″

  • 200mm (8 inch): 10″ x 14.5″ x 32.5″

  • NOTE: Optional Extended Platform will add ≈ 6″ to the overall width of the machine.

Options

  • Extended Platform

  • Recessed mounting

  • Vespel package for high temperature applications

  • Stainless steel covers.

  • Hot boat sensor


Features & Benefits

  • The Eureka Junior Series III will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.

  • As with all Mactronix wafer transfer systems, the Eureka Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.

  • With the push of a button, the machine transfers wafers safely and automatically.

  • The Eureka Series wafer transfer machines have a proven track record and are completely air operated, therefore cost effective. Its simple design eliminates extensive R&M training.

  • Flat alignment is preserved during transfer.

  • Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.

  • Retainers default to closed position to prevent dropping wafers in the event of an air pressure loss.

  • Aluminum parts are hard black anodized for corrosion resistance.

  • Wafer contact is minimized to ensure maximum cleanliness for critical diffusion processes, improving yields and productivity.

  • Uptime will exceed 99.25%.

    • MTBF (mean time between failure): 2,500 hours

    • MTBA (mean time between assist): 1,000 hours

    • MTTR (mean time to repair): 1 hour



美国:+1 (408) 420-3561    |   北京:+86 (010) 62561331    |   上海:+86 (021) 61363596


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