产品详情
MacLite Transfer Machine
Brand: Mactronix
Model: MCL x25
产品详情

Specifications

  • Power:

  • 220/110VAC    50/60Hz    Single Phase

  • 3 Amp @ 110VAC

  • Grounding:

  • Single Point Low Impedance VAC (provided)

  • Exhaust:

  • 1.25″ Diameter port; 5 CFM max. (non-process)

  • Wafer Size:

  • 3” (75 mm)  thru  8” (200 mm)

  • Weight:

  • ≈ 50 Lbs.

  • Dimensions (W x D x H):

  • 75mm thru 150mm (3″ thru 6″): 8″ x 14″ x 32″

  • 200mm (8 inch): 10″ x 14.5″ x 32.5″

  • NOTE: Optional Extended Platform will add ≈ 6″ to the overall width of the machine.

Options

  • Extended Platform

  • Vespel package for high temperature applications

  • Stainless steel covers

  • Hot Wafer/Boat Sensor


Features & Benefits

  • The MacLite Junior Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.

  • As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.

  • Fast & Smooth, featuring ramped speeds. A 25 wafer transfer is under 40 seconds.

  • Operator interface is with a 12 key keypad with a 4 line LCD display.

  • MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz.

  • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).

  • Single Board PC controlled.

  • Sensors detect wafers and cassette or process carrier presence for safety.

  • Flat alignment is maintained during transfer.

  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.

  • All exposed aluminum parts are hard Black Anodized.

  • Covers are powder covered aircraft grade aluminum.

  • A “Technician Mode” is provided to facilitate preventative maintenance.

  • Uptime will exceed 99.95%.

    • MTBF (mean time between failure): 2,500 hours

    • MTBA (mean time between assist): 1,000 hours

    • MTTR (mean time to repair): 1 hour




美国:+1 (408) 420-3561    |   北京:+86 (010) 62561331    |   上海:+86 (021) 61363596


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