产品详情
MacLite 2 Stage Moving Platform
Brand: Mactronix
Model: ML2-x25
产品详情

Specifications

  • Power:

  • 220/110VAC    50/60Hz    Single Phase

  • 3 Amp @ 110VAC

  • Grounding:

  • Single Point Low Impedance VAC (provided)

  • Exhaust:

  • 1.25″ Diameter port; 5 CFM max (non-process)

  • Wafer Size:

  • 3” (75 mm)  thru  8” (200 mm)

  • Weight:

  • ≈ 70 Lbs.

  • Dimensions (W x D x H):

  • 200 mm (8 inch): 17” x 24” x 47”

Options

  • Vespel package for high temperature applications

  • Stainless steel covers.

  • Hot Wafer/Boat Sensor


Features & Benefits

  • The MacLite Junior 2-Stage Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.

  • As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.

  • Fast & Smooth automatic transfer, featuring ramped elevator and platform speeds. One transfer cycle takes less than 45 seconds.

  • Operator interface is with a 12 key keypad and a 4 line LCD display.

  • Stage shifts left and right for safe and easy loading/unloading of cassettes and boats.

  • MacLite machines are completely electronic, with an auto switching power supply to accomodate 110 VAC 60 Hz or 240 VAC 50/60 Hz.

  • Clean operation introduces less than 1.5 particles that are less than .25 micron in diameter, per wafers per transfer.

  • Single Board PC controlled.

  • Sensors detect wafers and cassette or process carrier presence for safety.

  • Flat/Notch alignment is maintained during transfer.

  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.

  • Pressure sensors are used on the lift system and platform to prevent both personnel and wafer damage during transfer.

  • All exposed aluminum parts are Anodized for corrosion protection.

  • Covers are powder-coated aircraft grade aluminum.

  • All bearings are cleanroom rated.

  • A “Technician Mode” is provided to facilitate preventative maintenance.

  • Uptime will exceed 99.95%.

    • MTBF (mean time between failure): 2,500 hours

    • MTBA (mean time between assist): 1,000 hours

    • MTTR (mean time to repair): 1 hour



美国:+1 (408) 420-3561    |   北京:+86 (010) 62561331    |   上海:+86 (021) 61363596


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