产品详情
晶片微缺陷检测 Wafer Defects Metrology
晶片微缺陷检测 Wafer Defects Metrology
产品详情

应用领域: Wafer manufacturing (Si, GaAs等), IC fab, solar cell, MEMS.
设备特性: Automatic defects detection system with on high resolution microscopy.
·Automatic defect detection and classification.
·Blank wafers, device patterned wafers, SOI wafers.
·CD measurement.
·In-line or off-line for FPD and think film solar panels.

美国:+1 (408) 420-3561    |   北京:+86 (010) 62561331    |   上海:+86 (021) 61363596


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