NGS3500L
Advanced Metrology System
Automatic Defect Detection & Classification
Automated Die Inspection
Precision Dimensional Metrology
Critical Dimension (CD) and Overlay Metrology
Automatic and Manual Operation
Surface & Edge Defect Detection
Texture Defect Detection (e.g. stains, etc.)
Missing or Deformed Object Detection
Extensive Defect Review Capability
Graphic Maps & Image Archival
CAD file import
The NGS Series defect detection and metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or as versatile process development systems. These systems offer a choice of high end microscope components (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and linear motor staging with 0.02 micron scales. There are several configurations available depending on your requirements. These include:a 200mm platform, a 300mm platform and a robotic platform for automated wafer and part handling.
